The patterning toolbox FIB-o-mat: Exploiting the full potential of focused helium ions for nanofabrication

Focused beams of helium ions are a powerful tool for high-fidelity machining with spatial precision below 5 nm. Achieving such a high patterning precision over large areas and for different materials in a reproducible manner, however, is not trivial. Here, we introduce the Python toolbox FIB-o-mat f...

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Detalles Bibliográficos
Autores principales: Deinhart, Victor, Kern, Lisa-Marie, Kirchhof, Jan N, Juergensen, Sabrina, Sturm, Joris, Krauss, Enno, Feichtner, Thorsten, Kovalchuk, Sviatoslav, Schneider, Michael, Engel, Dieter, Pfau, Bastian, Hecht, Bert, Bolotin, Kirill I, Reich, Stephanie, Höflich, Katja
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Beilstein-Institut 2021
Materias:
Full Research Paper
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8042487/
https://www.ncbi.nlm.nih.gov/pubmed/33889477
http://dx.doi.org/10.3762/bjnano.12.25

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