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Strain effects on polycrystalline germanium thin films

Polycrystalline Ge thin films have attracted increasing attention because their hole mobilities exceed those of single-crystal Si wafers, while the process temperature is low. In this study, we investigate the strain effects on the crystal and electrical properties of polycrystalline Ge layers forme...

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Detalles Bibliográficos
Autores principales:	Imajo, Toshifumi, Suemasu, Takashi, Toko, Kaoru
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Nature Publishing Group UK 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8050231/ https://www.ncbi.nlm.nih.gov/pubmed/33859279 http://dx.doi.org/10.1038/s41598-021-87616-x

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