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Improved route to a diphenoxide-based precursor for chemical vapour deposition of parylene AF-4

In this work, we present the synthesis of an alternative precursor for chemical vapour deposition of parylene AF-4 to the widely used standard, octafluoro[2.2]paracyclophane. The standard precursor suffers from uncertainties in its supply chain and its synthesis is of low yield. A comparison between...

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Detalles Bibliográficos
Autores principales: Kast, Daniel, Franz, Gerhard, Senkevich, Jay J.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: The Royal Society 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8059661/
https://www.ncbi.nlm.nih.gov/pubmed/33996121
http://dx.doi.org/10.1098/rsos.201921