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Improved route to a diphenoxide-based precursor for chemical vapour deposition of parylene AF-4
In this work, we present the synthesis of an alternative precursor for chemical vapour deposition of parylene AF-4 to the widely used standard, octafluoro[2.2]paracyclophane. The standard precursor suffers from uncertainties in its supply chain and its synthesis is of low yield. A comparison between...
Autores principales: | , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
The Royal Society
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8059661/ https://www.ncbi.nlm.nih.gov/pubmed/33996121 http://dx.doi.org/10.1098/rsos.201921 |