Nanoscale Ferroelectric Characterization with Heterodyne Megasonic Piezoresponse Force Microscopy

Piezoresponse force microscopy (PFM), as a powerful nanoscale characterization technique, has been extensively utilized to elucidate diverse underlying physics of ferroelectricity. However, intensive studies of conventional PFM have revealed a growing number of concerns and limitations which are largely challenging its validity and applications. In this study, an advanced PFM technique is reported, namely heterodyne megasonic piezoresponse force microscopy (HM‐PFM), which uses 10(6) to 10(8) Hz high‐frequency excitation and heterodyne method to measure the piezoelectric strain at nanoscale. It is found that HM‐PFM can unambiguously provide standard ferroelectric domain and hysteresis loop measurements, and an effective domain characterization with excitation frequency up to ≈110 MHz is demonstrated. Most importantly, owing to the high‐frequency and heterodyne scheme, the contributions from both electrostatic force and electrochemical strain can be significantly minimized in HM‐PFM. Furthermore, a special measurement of difference‐frequency piezoresponse frequency spectrum (DFPFS) is developed on HM‐PFM and a distinct DFPFS characteristic is observed on the materials with piezoelectricity. By performing DFPFS measurement, a truly existed but very weak electromechanical coupling in CH(3)NH(3)PbI(3) perovskite is revealed. It is believed that HM‐PFM can be an excellent candidate for the ferroelectric or piezoelectric studies where conventional PFM results are highly controversial.