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Fabrication Process for Deep Submicron SQUID Circuits with Three Independent Niobium Layers

We present a fabrication technology for nanoscale superconducting quantum interference devices (SQUIDs) with overdamped superconductor-normal metal-superconductor (SNS) trilayer Nb/HfTi/Nb Josephson junctions. A combination of electron-beam lithography with chemical-mechanical polishing and magnetro...

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Detalles Bibliográficos
Autores principales:	Wolter, Silke, Linek, Julian, Altmann, Josepha, Weimann, Thomas, Bechstein, Sylke, Kleiner, Reinhold, Beyer, Jörn, Koelle, Dieter, Kieler, Oliver
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8064365/ https://www.ncbi.nlm.nih.gov/pubmed/33805232 http://dx.doi.org/10.3390/mi12040350

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