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Temperature Compensation of the MEMS-Based Electrochemical Seismic Sensors

Electrochemical seismic sensors that employ liquid as their inertial masses have the advantages of high performances in the low-frequency domain and a large working inclination. However, the surrounding temperature changes have serious impacts on the sensitivities of the sensors, which makes them un...

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Detalles Bibliográficos
Autores principales:	Xu, Chao, Wang, Junbo, Chen, Deyong, Chen, Jian, Qi, Wenjie, Liu, Bowen, Liang, Tian, She, Xu
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8066024/ https://www.ncbi.nlm.nih.gov/pubmed/33918243 http://dx.doi.org/10.3390/mi12040387

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