An Electric Field Microsensor with Mutual Shielding Electrodes

This paper proposes an electric field microsensor (EFM) with mutual shielding electrodes. Based on the charge-induction principle, the EFM consists of fixed electrodes and piezoelectric-driving vertically-movable electrodes. All the fixed electrodes and movable electrodes work as both sensing electr...

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Detalles Bibliográficos
Autores principales: Lei, Hucheng, Xia, Shanhong, Chu, Zhaozhi, Ling, Biyun, Peng, Chunrong, Zhang, Zhouwei, Liu, Jun, Zhang, Wei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8067120/
https://www.ncbi.nlm.nih.gov/pubmed/33810502
http://dx.doi.org/10.3390/mi12040360

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