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Wafer-Scale Epitaxial Low Density InAs/GaAs Quantum Dot for Single Photon Emitter in Three-Inch Substrate

In this work, we successfully achieved wafer-scale low density InAs/GaAs quantum dots (QDs) for single photon emitter on three-inch wafer by precisely controlling the growth parameters. The highly uniform InAs/GaAs QDs show low density of [Formula: see text] within the radius of 2 cm. When embedding...

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Detalles Bibliográficos
Autores principales:	Huang, Xiaoying, Su, Rongbin, Yang, Jiawei, Rao, Mujie, Liu, Jin, Yu, Ying, Yu, Siyuan
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8067461/ https://www.ncbi.nlm.nih.gov/pubmed/33917459 http://dx.doi.org/10.3390/nano11040930

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