A System in Package Based on a Piezoelectric Micromachined Ultrasonic Transducer Matrix for Ranging Applications

This paper proposes a system in package (SiP) for ultrasonic ranging composed of a 4 × 8 matrix of piezoelectric micromachined ultrasonic transducers (PMUT) and an interface integrated circuit (IC). The PMUT matrix is fabricated using the PiezoMUMPS process and the IC is implemented in the AMS 0.35...

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Autores principales: Robichaud, Alexandre, Deslandes, Dominic, Cicek, Paul-Vahé, Nabki, Frederic
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Communication
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8067833/
https://www.ncbi.nlm.nih.gov/pubmed/33917129
http://dx.doi.org/10.3390/s21082590
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author Robichaud, Alexandre
Deslandes, Dominic
Cicek, Paul-Vahé
Nabki, Frederic
author_facet Robichaud, Alexandre
Deslandes, Dominic
Cicek, Paul-Vahé
Nabki, Frederic
author_sort Robichaud, Alexandre
collection PubMed
description This paper proposes a system in package (SiP) for ultrasonic ranging composed of a 4 × 8 matrix of piezoelectric micromachined ultrasonic transducers (PMUT) and an interface integrated circuit (IC). The PMUT matrix is fabricated using the PiezoMUMPS process and the IC is implemented in the AMS 0.35 µm technology. Simulation results for the PMUT are compared to the measurement results, and an equivalent circuit has been derived to allow a better approximation of the load of the PMUT on the IC. The control circuit is composed of a high-voltage pulser to drive the PMUT for transmission and of a transimpedance amplifier to amplify the received echo. The working frequency of the system is 1.5 MHz.
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spelling pubmed-80678332021-04-25 A System in Package Based on a Piezoelectric Micromachined Ultrasonic Transducer Matrix for Ranging Applications Robichaud, Alexandre Deslandes, Dominic Cicek, Paul-Vahé Nabki, Frederic Sensors (Basel) Communication This paper proposes a system in package (SiP) for ultrasonic ranging composed of a 4 × 8 matrix of piezoelectric micromachined ultrasonic transducers (PMUT) and an interface integrated circuit (IC). The PMUT matrix is fabricated using the PiezoMUMPS process and the IC is implemented in the AMS 0.35 µm technology. Simulation results for the PMUT are compared to the measurement results, and an equivalent circuit has been derived to allow a better approximation of the load of the PMUT on the IC. The control circuit is composed of a high-voltage pulser to drive the PMUT for transmission and of a transimpedance amplifier to amplify the received echo. The working frequency of the system is 1.5 MHz. MDPI 2021-04-07 /pmc/articles/PMC8067833/ /pubmed/33917129 http://dx.doi.org/10.3390/s21082590 Text en © 2021 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Communication
Robichaud, Alexandre
Deslandes, Dominic
Cicek, Paul-Vahé
Nabki, Frederic
A System in Package Based on a Piezoelectric Micromachined Ultrasonic Transducer Matrix for Ranging Applications
title A System in Package Based on a Piezoelectric Micromachined Ultrasonic Transducer Matrix for Ranging Applications
title_full A System in Package Based on a Piezoelectric Micromachined Ultrasonic Transducer Matrix for Ranging Applications
title_fullStr A System in Package Based on a Piezoelectric Micromachined Ultrasonic Transducer Matrix for Ranging Applications
title_full_unstemmed A System in Package Based on a Piezoelectric Micromachined Ultrasonic Transducer Matrix for Ranging Applications
title_short A System in Package Based on a Piezoelectric Micromachined Ultrasonic Transducer Matrix for Ranging Applications
title_sort system in package based on a piezoelectric micromachined ultrasonic transducer matrix for ranging applications
topic Communication
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8067833/
https://www.ncbi.nlm.nih.gov/pubmed/33917129
http://dx.doi.org/10.3390/s21082590
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