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3D Simulation-Based Acoustic Wave Resonator Analysis and Validation Using Novel Finite Element Method Software

This work illustrates the analysis of Film Bulk Acoustic Resonators (FBAR) using 3D Finite Element (FEM) simulations with the software OnScale in order to predict and improve resonator performance and quality before manufacturing. This kind of analysis minimizes manufacturing cycles by reducing desi...

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Detalles Bibliográficos
Autores principales: Vidana Morales, Ruth Yadira, Ortega Cisneros, Susana, Camacho Perez, Jose Rodrigo, Sandoval Ibarra, Federico, Casas Carrillo, Ricardo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8069924/
https://www.ncbi.nlm.nih.gov/pubmed/33921505
http://dx.doi.org/10.3390/s21082715
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author Vidana Morales, Ruth Yadira
Ortega Cisneros, Susana
Camacho Perez, Jose Rodrigo
Sandoval Ibarra, Federico
Casas Carrillo, Ricardo
author_facet Vidana Morales, Ruth Yadira
Ortega Cisneros, Susana
Camacho Perez, Jose Rodrigo
Sandoval Ibarra, Federico
Casas Carrillo, Ricardo
author_sort Vidana Morales, Ruth Yadira
collection PubMed
description This work illustrates the analysis of Film Bulk Acoustic Resonators (FBAR) using 3D Finite Element (FEM) simulations with the software OnScale in order to predict and improve resonator performance and quality before manufacturing. This kind of analysis minimizes manufacturing cycles by reducing design time with 3D simulations running on High-Performance Computing (HPC) cloud services. It also enables the identification of manufacturing effects on device performance. The simulation results are compared and validated with a manufactured FBAR device, previously reported, to further highlight the usefulness and advantages of the 3D simulations-based design process. In the 3D simulation results, some analysis challenges, like boundary condition definitions, mesh tuning, loss source tracing, and device quality estimations, were studied. Hence, it is possible to highlight that modern FEM solvers, like OnScale enable unprecedented FBAR analysis and design optimization.
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spelling pubmed-80699242021-04-26 3D Simulation-Based Acoustic Wave Resonator Analysis and Validation Using Novel Finite Element Method Software Vidana Morales, Ruth Yadira Ortega Cisneros, Susana Camacho Perez, Jose Rodrigo Sandoval Ibarra, Federico Casas Carrillo, Ricardo Sensors (Basel) Article This work illustrates the analysis of Film Bulk Acoustic Resonators (FBAR) using 3D Finite Element (FEM) simulations with the software OnScale in order to predict and improve resonator performance and quality before manufacturing. This kind of analysis minimizes manufacturing cycles by reducing design time with 3D simulations running on High-Performance Computing (HPC) cloud services. It also enables the identification of manufacturing effects on device performance. The simulation results are compared and validated with a manufactured FBAR device, previously reported, to further highlight the usefulness and advantages of the 3D simulations-based design process. In the 3D simulation results, some analysis challenges, like boundary condition definitions, mesh tuning, loss source tracing, and device quality estimations, were studied. Hence, it is possible to highlight that modern FEM solvers, like OnScale enable unprecedented FBAR analysis and design optimization. MDPI 2021-04-12 /pmc/articles/PMC8069924/ /pubmed/33921505 http://dx.doi.org/10.3390/s21082715 Text en © 2021 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Vidana Morales, Ruth Yadira
Ortega Cisneros, Susana
Camacho Perez, Jose Rodrigo
Sandoval Ibarra, Federico
Casas Carrillo, Ricardo
3D Simulation-Based Acoustic Wave Resonator Analysis and Validation Using Novel Finite Element Method Software
title 3D Simulation-Based Acoustic Wave Resonator Analysis and Validation Using Novel Finite Element Method Software
title_full 3D Simulation-Based Acoustic Wave Resonator Analysis and Validation Using Novel Finite Element Method Software
title_fullStr 3D Simulation-Based Acoustic Wave Resonator Analysis and Validation Using Novel Finite Element Method Software
title_full_unstemmed 3D Simulation-Based Acoustic Wave Resonator Analysis and Validation Using Novel Finite Element Method Software
title_short 3D Simulation-Based Acoustic Wave Resonator Analysis and Validation Using Novel Finite Element Method Software
title_sort 3d simulation-based acoustic wave resonator analysis and validation using novel finite element method software
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8069924/
https://www.ncbi.nlm.nih.gov/pubmed/33921505
http://dx.doi.org/10.3390/s21082715
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