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3D Simulation-Based Acoustic Wave Resonator Analysis and Validation Using Novel Finite Element Method Software
This work illustrates the analysis of Film Bulk Acoustic Resonators (FBAR) using 3D Finite Element (FEM) simulations with the software OnScale in order to predict and improve resonator performance and quality before manufacturing. This kind of analysis minimizes manufacturing cycles by reducing desi...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8069924/ https://www.ncbi.nlm.nih.gov/pubmed/33921505 http://dx.doi.org/10.3390/s21082715 |