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3D Simulation-Based Acoustic Wave Resonator Analysis and Validation Using Novel Finite Element Method Software

This work illustrates the analysis of Film Bulk Acoustic Resonators (FBAR) using 3D Finite Element (FEM) simulations with the software OnScale in order to predict and improve resonator performance and quality before manufacturing. This kind of analysis minimizes manufacturing cycles by reducing desi...

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Detalles Bibliográficos
Autores principales:	Vidana Morales, Ruth Yadira, Ortega Cisneros, Susana, Camacho Perez, Jose Rodrigo, Sandoval Ibarra, Federico, Casas Carrillo, Ricardo
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8069924/ https://www.ncbi.nlm.nih.gov/pubmed/33921505 http://dx.doi.org/10.3390/s21082715

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