Mastering of NIL Stamps with Undercut T-Shaped Features from Single Layer to Multilayer Stamps

Biomimetic structures such as structural colors demand a fabrication technology of complex three-dimensional nanostructures on large areas. Nanoimprint lithography (NIL) is capable of large area replication of three-dimensional structures, but the master stamp fabrication is often a bottleneck. We h...

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Detalles Bibliográficos
Autores principales: Taus, Philipp, Prinz, Adrian, Wanzenboeck, Heinz D., Schuller, Patrick, Tsenov, Anton, Schinnerl, Markus, Shawrav, Mostafa M., Haslinger, Michael, Muehlberger, Michael
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8070167/
https://www.ncbi.nlm.nih.gov/pubmed/33918594
http://dx.doi.org/10.3390/nano11040956

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