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Magnification inferred curvature for real-time curvature monitoring
The in situ and real-time measurement of curvature changes of optically reflecting surfaces is a key element to better control bottom-up fabrication processes in the semiconductor industry, but also to follow or adjust mirror deformations during fabrication and use for space or optics industries. De...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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Nature Publishing Group UK
2021
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8087714/ https://www.ncbi.nlm.nih.gov/pubmed/33931683 http://dx.doi.org/10.1038/s41598-021-88722-6 |