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Lightweight Thermal Compensation Technique for MEMS Capacitive Accelerometer Oriented to Quasi-Static Measurements

The application of MEMS capacitive accelerometers is limited by its thermal dependence, and each accelerometer must be individually calibrated to improve its performance. In this work, a light calibration method based on theoretical studies is proposed to obtain two characteristic parameters of the...

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Detalles Bibliográficos
Autores principales:	Martínez, Javier, Asiain, David, Beltrán, José Ramón
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8124870/ https://www.ncbi.nlm.nih.gov/pubmed/33946219 http://dx.doi.org/10.3390/s21093117

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