A study of anode area physical parameters of asymmetric combined gas discharge

The layered structure properties of an asymmetric combined gas discharge have been studied. The main physical parameters of the plasma in the zone of electron acceleration to high energies of tens and hundreds of electron-volts at various values of the supplied microwave power were determined based on the analysis of the discharge current-voltage characteristics. The effect of combined discharge plasma on the surface of products made of various materials and placed in the resonator chamber of a technological unit was experimentally investigated, and it is shown that it can lead to a significant increase in the strength of the processed products in terms of microhardness.