Improving Output Performance of a Resonant Piezoelectric Pump by Adding Proof Masses to a U-Shaped Piezoelectric Resonator

This study proposes the improvement of the output performance of a resonant piezoelectric pump by adding proof masses to the free ends of the prongs of a U-shaped piezoelectric resonator. Simulation analyses show that the out-of-phase resonant frequency of the developed resonator can be tuned more efficiently within a more compact structure to the optimal operating frequency of the check valves by adjusting the thickness of the proof masses, which ensures that both the resonator and the check valves can operate at the best condition in a piezoelectric pump. A separable prototype piezoelectric pump composed of the proposed resonator and two diaphragm pumps was designed and fabricated with outline dimensions of 30 mm × 37 mm × 54 mm. Experimental results demonstrate remarkable improvements in the output performance and working efficiency of the piezoelectric pump. With the working fluid of liquid water and under a sinusoidal driving voltage of 298.5 V(pp), the miniature pump can achieve the maximum flow rate of 2258.9 mL/min with the highest volume efficiency of 77.1% and power consumption of 2.12 W under zero backpressure at 311/312 Hz, and the highest backpressure of 157.3 kPa under zero flow rate at 383 Hz.