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Metasurface Fabrication by Cryogenic and Bosch Deep Reactive Ion Etching

The research field of metasurfaces has attracted considerable attention in recent years due to its high potential to achieve flat, ultrathin optical devices of high performance. Metasurfaces, consisting of artificial patterns of subwavelength dimensions, often require fabrication techniques with hig...

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Detalles Bibliográficos
Autores principales:	Baracu, Angela M., Dirdal, Christopher A., Avram, Andrei M., Dinescu, Adrian, Muller, Raluca, Jensen, Geir Uri, Thrane, Paul Conrad Vaagen, Angelskår, Hallvard
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8145705/ https://www.ncbi.nlm.nih.gov/pubmed/33946701 http://dx.doi.org/10.3390/mi12050501

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