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Wafer-Bonding Fabricated CMUT Device with Parylene Coating

The advantages of the capacitive micromachined ultrasound transducer (CMUT) technology have provided revolutionary advances in ultrasound imaging. Extensive research on CMUT devices for high-frequency medical imaging applications has been conducted because of strong demands and fabrication realizati...

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Detalles Bibliográficos
Autores principales:	He, Changde, Zhang, Binzhen, Xue, Chenyang, Zhang, Wendong, Zhang, Shengdong
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8147958/ https://www.ncbi.nlm.nih.gov/pubmed/34064449 http://dx.doi.org/10.3390/mi12050516

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