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Fabrication and Characterization of a Microscale Piezoelectric Vibrator Based on Electrohydrodynamic Jet Printed PZT Thick Film

This paper proposes a novel way of preparing a PZT thick film micro vibrator using the electrohydrodynamic jet (E-Jet) printing technique. Initially, a micro piezoelectric vibrator was simulated and designed for obtaining optimized structure, which has a total thickness of less than 600 µm. Subseque...

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Detalles Bibliográficos
Autores principales:	Wang, Dazhi, Zhao, Kuipeng, Yuan, Yuheng, Wang, Zhu, Zong, Haoran, Zhang, Xi, Liang, Junsheng
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8148122/ https://www.ncbi.nlm.nih.gov/pubmed/34066454 http://dx.doi.org/10.3390/mi12050524

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