Cargando…

Effects of Thermal Annealing on the Properties of Zirconium-Doped Mg(x)Zn(1−X)O Films Obtained through Radio-Frequency Magnetron Sputtering

Zirconium-doped Mg(x)Zn(1−x)O (Zr-doped MZO) mixed-oxide films were investigated, and the temperature sensitivity of their electric and optical properties was characterized. Zr-doped MZO films were deposited through radio-frequency magnetron sputtering using a 4-inch ZnO/MgO/ZrO(2) (75/20/5 wt%) tar...

Descripción completa

Detalles Bibliográficos
Autores principales:	Lin, Wen-Yen, Chien, Feng-Tsun, Chiu, Hsien-Chin, Sheu, Jinn-Kong, Hsueh, Kuang-Po
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8160718/ https://www.ncbi.nlm.nih.gov/pubmed/34065275 http://dx.doi.org/10.3390/membranes11050373

Ejemplares similares

Rapid thermal annealing for high-quality ITO thin films deposited by radio-frequency magnetron sputtering
por: Prepelita, Petronela, et al.
Publicado: (2019)

Stable Superhydrophobic and Antimicrobial ZnO/Polytetrafluoroethylene Films via Radio Frequency (RF) Magnetron Sputtering
por: Zhuang, Aoyun, et al.
Publicado: (2023)

High Responsivity MgZnO Ultraviolet Thin-Film Phototransistor Developed Using Radio Frequency Sputtering
por: Li, Jyun-Yi, et al.
Publicado: (2017)

Formation of Thin NiGe Films by Magnetron Sputtering and Flash Lamp Annealing
por: Begeza, Viktor, et al.
Publicado: (2020)

Investigation of the Effects of Rapid Thermal Annealing on the Electron Transport Mechanism in Nitrogen-Doped ZnO Thin Films Grown by RF Magnetron Sputtering
por: Simeonov, Simeon, et al.
Publicado: (2021)

Characterization of the Response of Magnetron Sputtered In(2)O(3−x) Sensors to NO(2)
por: Panzardi, Enza, et al.
Publicado: (2023)

Influence of Deposition Modes and Thermal Annealing on Residual Stresses in Magnetron-Sputtered YSZ Membranes
por: Solovyev, Andrey, et al.
Publicado: (2022)

Anisotropic Ti(x)Sn(1-)(x)O(2 )nanostructures prepared by magnetron sputter deposition
por: Chen, Shutian, et al.
Publicado: (2011)

Structural and optical properties of a radio frequency magnetron-sputtered ZnO thin film with different growth angles
por: Ko, Ki-Han, et al.
Publicado: (2012)

Effect of Silver Dopants on the ZnO Thin Films Prepared by a Radio Frequency Magnetron Co-Sputtering System
por: Liu, Fang-Cheng, et al.
Publicado: (2017)

Catalytic growth of ZnO nanostructures by r.f. magnetron sputtering
por: Arroyo-Hernández, María, et al.
Publicado: (2011)

Radio Frequency Plasma-Enhanced Reactive Magnetron Sputtering Deposition of α-SiN(x) on Photonic Crystal—Laser Diodes for Facet Passivation
por: Wang, Yuancheng, et al.
Publicado: (2019)

Resistive Switching Characteristics of Li-Doped ZnO Thin Films Based on Magnetron Sputtering
por: Zhao, Xiaofeng, et al.
Publicado: (2019)

Computational explorations in magnetron sputtering
por: McInerney, E J
Publicado: (2014)

Development and Evaluation of Copper Based Transparent Heat Reflectors Obtained by Magnetron Sputtering
por: Pana, Iulian, et al.
Publicado: (2022)

Calcium Phosphates–Chitosan Composite Layers Obtained by Combining Radio-Frequency Magnetron Sputtering and Matrix-Assisted Pulsed Laser Evaporation Techniques
por: Zarif, Maria Elena, et al.
Publicado: (2022)

Investigation of Optimum Mg Doping Content and Annealing Parameters of Cu(2)Mg(x)Zn(1−x)SnS(4) Thin Films for Solar Cells
por: Sui, Yingrui, et al.
Publicado: (2019)

(Cr(1−x)Al(x))N Coating Deposition by Short-Pulse High-Power Dual Magnetron Sputtering
por: Grenadyorov, Alexander, et al.
Publicado: (2022)

MoO(x) thin films deposited by magnetron sputtering as an anode for aqueous micro-supercapacitors
por: Liu, Can, et al.
Publicado: (2013)

On the Microstructure and Mechanical Properties of CrN(x)/Ag Multilayer Films Prepared by Magnetron Sputtering
por: Hong, Chunfu, et al.
Publicado: (2020)

Synthesis and Characterization of Cu(2)ZnSnS(4) Thin Films Obtained by Combined Magnetron Sputtering and Pulsed Laser Deposition
por: Zaki, Mohamed-Yassine, et al.
Publicado: (2021)

Processing and Study of Optical and Electrical Properties of (Mg, Al) Co-Doped ZnO Thin Films Prepared by RF Magnetron Sputtering for Photovoltaic Application
por: Abed, Chayma, et al.
Publicado: (2020)

Structural and optical properties of ZnS thin films deposited by RF magnetron sputtering
por: Hwang, Dong Hyun, et al.
Publicado: (2012)

Assessment of Coating Quality Obtained on Flame-Retardant Fabrics by a Magnetron Sputtering Method
por: Miśkiewicz, Pamela, et al.
Publicado: (2021)

Heteroepitaxial growth of TiN film on MgO (100) by reactive magnetron sputtering
por: Chen, Wei-Chun, et al.
Publicado: (2014)

Selected properties of Al(x)Zn(y)O thin films prepared by reactive pulsed magnetron sputtering using a two-element Zn/Al target
por: Posadowski, Witold, et al.
Publicado: (2022)

UV-Enhanced Ethanol Sensing Properties of RF Magnetron-Sputtered ZnO Film
por: Huang, Jinyu, et al.
Publicado: (2017)

Charge Transfer in Patterned Bilayer Film of Ag/ZnS Composite by Magnetron Control Sputtering
por: Zhang, Yongjun, et al.
Publicado: (2022)

Time-resolved grazing-incidence pair distribution functions during deposition by radio-frequency magnetron sputtering
por: Roelsgaard, Martin, et al.
Publicado: (2019)

Comparison of CrN Coatings Prepared Using High-Power Impulse Magnetron Sputtering and Direct Current Magnetron Sputtering
por: Bai, Heda, et al.
Publicado: (2023)

Characteristics of Carrier Transport and Crystallographic Orientation Distribution of Transparent Conductive Al-Doped ZnO Polycrystalline Films Deposited by Radio-Frequency, Direct-Current, and Radio-Frequency-Superimposed Direct-Current Magnetron Sputtering
por: Nomoto, Junichi, et al.
Publicado: (2017)

Synthesis of Intermetallic (Mg(1−x),Al(x))(2)Ca by Combinatorial Sputtering
por: Keuter, Philipp, et al.
Publicado: (2019)

Metallization of ceramic vacuum chambers by magnetron sputtering
por: Kühn, H, et al.
Publicado: (1988)

Effect of Ge Content on the Formation of Ge Nanoclusters in Magnetron-Sputtered GeZrO(x)-Based Structures
por: Khomenkova, L., et al.
Publicado: (2017)

Preparation of a ZnO Nanostructure as the Anode Material Using RF Magnetron Sputtering System
por: Lee, Seokwon, et al.
Publicado: (2022)

Polyether Ether Ketone Coated with Ultra-Thin Films of Titanium Oxide and Zirconium Oxide Fabricated by DC Magnetron Sputtering for Biomedical Application
por: Akimchenko, Igor O., et al.
Publicado: (2022)

Enhanced radio-frequency performance of niobium films on copper substrates deposited by high power impulse magnetron sputtering
por: Arzeo, M, et al.
Publicado: (2022)

Substrate Temperature Dependent Surface Morphology and Photoluminescence of Germanium Quantum Dots Grown by Radio Frequency Magnetron Sputtering
por: Samavati, Alireza, et al.
Publicado: (2012)

Structural and nanomechanical properties of BiFeO(3) thin films deposited by radio frequency magnetron sputtering
por: Jian, Sheng-Rui, et al.
Publicado: (2013)

Radio Frequency Magnetron Sputtering Deposition of TiO(2) Thin Films and Their Perovskite Solar Cell Applications
por: Chen, Cong, et al.
Publicado: (2015)

Cannot write session to /tmp/vufind_sessions/sess_rce9kearhk3b9oh5h6ecei1n4i