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Effects of Thermal Annealing on the Properties of Zirconium-Doped Mg(x)Zn(1−X)O Films Obtained through Radio-Frequency Magnetron Sputtering

Zirconium-doped Mg(x)Zn(1−x)O (Zr-doped MZO) mixed-oxide films were investigated, and the temperature sensitivity of their electric and optical properties was characterized. Zr-doped MZO films were deposited through radio-frequency magnetron sputtering using a 4-inch ZnO/MgO/ZrO(2) (75/20/5 wt%) tar...

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Detalles Bibliográficos
Autores principales:	Lin, Wen-Yen, Chien, Feng-Tsun, Chiu, Hsien-Chin, Sheu, Jinn-Kong, Hsueh, Kuang-Po
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8160718/ https://www.ncbi.nlm.nih.gov/pubmed/34065275 http://dx.doi.org/10.3390/membranes11050373

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