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Synthesis of Copper Nitride Layers by the Pulsed Magnetron Sputtering Method Carried out under Various Operating Conditions

Copper nitride shows various properties that depend on the structure of the material and is influenced by the change in technical parameters. In the present work, Cu–N layers were synthesized using the pulsed magnetron sputtering method. The synthesis was performed under different operating conditio...

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Detalles Bibliográficos
Autores principales:	Wilczopolska, Magdalena, Nowakowska-Langier, Katarzyna, Okrasa, Sebastian, Skowronski, Lukasz, Minikayev, Roman, Strzelecki, Grzegorz W., Chodun, Rafal, Zdunek, Krzysztof
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8160974/ https://www.ncbi.nlm.nih.gov/pubmed/34065578 http://dx.doi.org/10.3390/ma14102694

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