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A Capacitive 3-Axis MEMS Accelerometer for Medipost: A Portable System Dedicated to Monitoring Imbalance Disorders

The constant development and miniaturization of MEMS sensors invariably provides new possibilities for their use in health-related and medical applications. The application of MEMS devices in posturographic systems allows faster diagnosis and significantly facilitates the work of medical staff. MEMS...

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Autores principales: Szermer, Michał, Zając, Piotr, Amrozik, Piotr, Maj, Cezary, Jankowski, Mariusz, Jabłoński, Grzegorz, Kiełbik, Rafał, Nazdrowicz, Jacek, Napieralska, Małgorzata, Sakowicz, Bartosz
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8161350/
https://www.ncbi.nlm.nih.gov/pubmed/34065449
http://dx.doi.org/10.3390/s21103564
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author Szermer, Michał
Zając, Piotr
Amrozik, Piotr
Maj, Cezary
Jankowski, Mariusz
Jabłoński, Grzegorz
Kiełbik, Rafał
Nazdrowicz, Jacek
Napieralska, Małgorzata
Sakowicz, Bartosz
author_facet Szermer, Michał
Zając, Piotr
Amrozik, Piotr
Maj, Cezary
Jankowski, Mariusz
Jabłoński, Grzegorz
Kiełbik, Rafał
Nazdrowicz, Jacek
Napieralska, Małgorzata
Sakowicz, Bartosz
author_sort Szermer, Michał
collection PubMed
description The constant development and miniaturization of MEMS sensors invariably provides new possibilities for their use in health-related and medical applications. The application of MEMS devices in posturographic systems allows faster diagnosis and significantly facilitates the work of medical staff. MEMS accelerometers constitute a vital part of such systems, particularly those intended for monitoring patients with imbalance disorders. The correct design of such sensors is crucial for gathering data about patient movement and ensuring the good overall performance of the entire system. This paper presents the design and measurements of a three-axis accelerometer dedicated for use in a device which tracks patient movement. Its main focus is the characterization of the sensor, comparing different designs and evaluating the impact of the packaging and readout circuit integration on sensor operation. Extensive testing and measurements confirm that the designed accelerometer works correctly and allows identifying the best design in terms of sensitivity/stability. Moreover, the response of the proposed sensor as a function of the applied acceleration demonstrates very good linearity only if the readout circuit is integrated in the same package as the MEMS sensor.
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spelling pubmed-81613502021-05-29 A Capacitive 3-Axis MEMS Accelerometer for Medipost: A Portable System Dedicated to Monitoring Imbalance Disorders Szermer, Michał Zając, Piotr Amrozik, Piotr Maj, Cezary Jankowski, Mariusz Jabłoński, Grzegorz Kiełbik, Rafał Nazdrowicz, Jacek Napieralska, Małgorzata Sakowicz, Bartosz Sensors (Basel) Article The constant development and miniaturization of MEMS sensors invariably provides new possibilities for their use in health-related and medical applications. The application of MEMS devices in posturographic systems allows faster diagnosis and significantly facilitates the work of medical staff. MEMS accelerometers constitute a vital part of such systems, particularly those intended for monitoring patients with imbalance disorders. The correct design of such sensors is crucial for gathering data about patient movement and ensuring the good overall performance of the entire system. This paper presents the design and measurements of a three-axis accelerometer dedicated for use in a device which tracks patient movement. Its main focus is the characterization of the sensor, comparing different designs and evaluating the impact of the packaging and readout circuit integration on sensor operation. Extensive testing and measurements confirm that the designed accelerometer works correctly and allows identifying the best design in terms of sensitivity/stability. Moreover, the response of the proposed sensor as a function of the applied acceleration demonstrates very good linearity only if the readout circuit is integrated in the same package as the MEMS sensor. MDPI 2021-05-20 /pmc/articles/PMC8161350/ /pubmed/34065449 http://dx.doi.org/10.3390/s21103564 Text en © 2021 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Szermer, Michał
Zając, Piotr
Amrozik, Piotr
Maj, Cezary
Jankowski, Mariusz
Jabłoński, Grzegorz
Kiełbik, Rafał
Nazdrowicz, Jacek
Napieralska, Małgorzata
Sakowicz, Bartosz
A Capacitive 3-Axis MEMS Accelerometer for Medipost: A Portable System Dedicated to Monitoring Imbalance Disorders
title A Capacitive 3-Axis MEMS Accelerometer for Medipost: A Portable System Dedicated to Monitoring Imbalance Disorders
title_full A Capacitive 3-Axis MEMS Accelerometer for Medipost: A Portable System Dedicated to Monitoring Imbalance Disorders
title_fullStr A Capacitive 3-Axis MEMS Accelerometer for Medipost: A Portable System Dedicated to Monitoring Imbalance Disorders
title_full_unstemmed A Capacitive 3-Axis MEMS Accelerometer for Medipost: A Portable System Dedicated to Monitoring Imbalance Disorders
title_short A Capacitive 3-Axis MEMS Accelerometer for Medipost: A Portable System Dedicated to Monitoring Imbalance Disorders
title_sort capacitive 3-axis mems accelerometer for medipost: a portable system dedicated to monitoring imbalance disorders
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8161350/
https://www.ncbi.nlm.nih.gov/pubmed/34065449
http://dx.doi.org/10.3390/s21103564
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