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Physical Vapor Deposition in Solid‐State Battery Development: From Materials to Devices
This review discusses the contribution of physical vapor deposition (PVD) processes to the development of electrochemical energy storage systems with emphasis on solid‐state batteries. A brief overview of different PVD technologies and details highlighting the utility of PVD for the fabrication and...
Autores principales: | , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
John Wiley and Sons Inc.
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8188201/ https://www.ncbi.nlm.nih.gov/pubmed/34105301 http://dx.doi.org/10.1002/advs.202002044 |