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Physical Vapor Deposition in Solid‐State Battery Development: From Materials to Devices

This review discusses the contribution of physical vapor deposition (PVD) processes to the development of electrochemical energy storage systems with emphasis on solid‐state batteries. A brief overview of different PVD technologies and details highlighting the utility of PVD for the fabrication and...

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Detalles Bibliográficos
Autores principales:	Lobe, Sandra, Bauer, Alexander, Uhlenbruck, Sven, Fattakhova‐Rohlfing, Dina
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	John Wiley and Sons Inc. 2021
Materias:	Reviews
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8188201/ https://www.ncbi.nlm.nih.gov/pubmed/34105301 http://dx.doi.org/10.1002/advs.202002044

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