Design and Characterization of Backside Termination Structures for Thick Fully-Depleted MAPS

Fully Depleted Monolithic Active Pixel Sensors (FD-MAPS) represent an appealing alternative to hybrid detectors for radiation imaging applications. We have recently demonstrated the feasibility of FD-MAPS based on a commercial 110 nm CMOS technology, adapted using high-resistivity substrates and bac...

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Detalles Bibliográficos
Autores principales: Corradino, Thomas, Dalla Betta, Gian-Franco, De Cilladi, Lorenzo, Neubüser, Coralie, Pancheri, Lucio
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8199031/
https://www.ncbi.nlm.nih.gov/pubmed/34072827
http://dx.doi.org/10.3390/s21113809

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8199031/
https://www.ncbi.nlm.nih.gov/pubmed/34072827
http://dx.doi.org/10.3390/s21113809

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