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Design and Characterization of Backside Termination Structures for Thick Fully-Depleted MAPS
Fully Depleted Monolithic Active Pixel Sensors (FD-MAPS) represent an appealing alternative to hybrid detectors for radiation imaging applications. We have recently demonstrated the feasibility of FD-MAPS based on a commercial 110 nm CMOS technology, adapted using high-resistivity substrates and bac...
Autores principales: | Corradino, Thomas, Dalla Betta, Gian-Franco, De Cilladi, Lorenzo, Neubüser, Coralie, Pancheri, Lucio |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8199031/ https://www.ncbi.nlm.nih.gov/pubmed/34072827 http://dx.doi.org/10.3390/s21113809 |
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