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Fabrication of a Micron-Scale Three-Dimensional Single Crystal Diamond Channel Using a Micro-Jet Water-Assisted Laser

Two types of a trench with conventional vertical and new reverse-V-shaped cross-sections were fabricated on single crystal diamond (SCD) substrate using a micro-jet water-assisted laser. In addition, a microwave plasma chemical vapor deposition device was used to produce multiple micrometer-sized ch...

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Detalles Bibliográficos
Autores principales:	Wei, Qiang, Zhang, Xiaofan, Lin, Fang, Wang, Ruozheng, Chen, Genqiang, Wang, Hong-Xing
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8199514/ https://www.ncbi.nlm.nih.gov/pubmed/34206091 http://dx.doi.org/10.3390/ma14113006

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