Epitaxial lift-off of freestanding (011) and (111) SrRuO(3) thin films using a water sacrificial layer

Two-dimensional freestanding thin films of single crystalline oxide perovskites are expected to have great potential in integration of new features to the current Si-based technology. Here, we showed the ability to create freestanding single crystalline (011)- and (111)-oriented SrRuO(3) thin films...

Descripción completa

Detalles Bibliográficos
Autores principales: Le, Phu T. P., ten Elshof, Johan E., Koster, Gertjan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8203781/
https://www.ncbi.nlm.nih.gov/pubmed/34127715
http://dx.doi.org/10.1038/s41598-021-91848-2
_version_ 1783708240755818496
author Le, Phu T. P.
ten Elshof, Johan E.
Koster, Gertjan
author_facet Le, Phu T. P.
ten Elshof, Johan E.
Koster, Gertjan
author_sort Le, Phu T. P.
collection PubMed
description Two-dimensional freestanding thin films of single crystalline oxide perovskites are expected to have great potential in integration of new features to the current Si-based technology. Here, we showed the ability to create freestanding single crystalline (011)- and (111)-oriented SrRuO(3) thin films using Sr(3)Al(2)O(6) water-sacrificial layer. The epitaxial Sr(3)Al(2)O(6)(011) and Sr(3)Al(2)O(6)(111) layers were realized on SrTiO(3)(011) and SrTiO(3)(111), respectively. Subsequently, SrRuO(3) films were epitaxially grown on these sacrificial layers. The freestanding single crystalline SrRuO(3)(011)(pc) and SrRuO(3)(111)(pc) films were successfully transferred on Si substrates, demonstrating possibilities to transfer desirable oriented oxide perovskite films on Si and arbitrary substrates.
format Online
Article
Text
id pubmed-8203781
institution National Center for Biotechnology Information
language English
publishDate 2021
publisher Nature Publishing Group UK
record_format MEDLINE/PubMed
spelling pubmed-82037812021-06-16 Epitaxial lift-off of freestanding (011) and (111) SrRuO(3) thin films using a water sacrificial layer Le, Phu T. P. ten Elshof, Johan E. Koster, Gertjan Sci Rep Article Two-dimensional freestanding thin films of single crystalline oxide perovskites are expected to have great potential in integration of new features to the current Si-based technology. Here, we showed the ability to create freestanding single crystalline (011)- and (111)-oriented SrRuO(3) thin films using Sr(3)Al(2)O(6) water-sacrificial layer. The epitaxial Sr(3)Al(2)O(6)(011) and Sr(3)Al(2)O(6)(111) layers were realized on SrTiO(3)(011) and SrTiO(3)(111), respectively. Subsequently, SrRuO(3) films were epitaxially grown on these sacrificial layers. The freestanding single crystalline SrRuO(3)(011)(pc) and SrRuO(3)(111)(pc) films were successfully transferred on Si substrates, demonstrating possibilities to transfer desirable oriented oxide perovskite films on Si and arbitrary substrates. Nature Publishing Group UK 2021-06-14 /pmc/articles/PMC8203781/ /pubmed/34127715 http://dx.doi.org/10.1038/s41598-021-91848-2 Text en © The Author(s) 2021 https://creativecommons.org/licenses/by/4.0/Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons licence, and indicate if changes were made. The images or other third party material in this article are included in the article's Creative Commons licence, unless indicated otherwise in a credit line to the material. If material is not included in the article's Creative Commons licence and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this licence, visit http://creativecommons.org/licenses/by/4.0/ (https://creativecommons.org/licenses/by/4.0/) .
spellingShingle Article
Le, Phu T. P.
ten Elshof, Johan E.
Koster, Gertjan
Epitaxial lift-off of freestanding (011) and (111) SrRuO(3) thin films using a water sacrificial layer
title Epitaxial lift-off of freestanding (011) and (111) SrRuO(3) thin films using a water sacrificial layer
title_full Epitaxial lift-off of freestanding (011) and (111) SrRuO(3) thin films using a water sacrificial layer
title_fullStr Epitaxial lift-off of freestanding (011) and (111) SrRuO(3) thin films using a water sacrificial layer
title_full_unstemmed Epitaxial lift-off of freestanding (011) and (111) SrRuO(3) thin films using a water sacrificial layer
title_short Epitaxial lift-off of freestanding (011) and (111) SrRuO(3) thin films using a water sacrificial layer
title_sort epitaxial lift-off of freestanding (011) and (111) srruo(3) thin films using a water sacrificial layer
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8203781/
https://www.ncbi.nlm.nih.gov/pubmed/34127715
http://dx.doi.org/10.1038/s41598-021-91848-2
work_keys_str_mv AT lephutp epitaxialliftoffoffreestanding011and111srruo3thinfilmsusingawatersacrificiallayer
AT tenelshofjohane epitaxialliftoffoffreestanding011and111srruo3thinfilmsusingawatersacrificiallayer
AT kostergertjan epitaxialliftoffoffreestanding011and111srruo3thinfilmsusingawatersacrificiallayer

Ejemplares similares