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Integrating Resonator to Enhance Magnetometer Microelectromechanical System Implementation with ASIC Compatible CMOS 0.18 μm Process

In this study, a multi-function microelectromechanical system (MEMS) was integrated with a MEMS oscillator, using the resonant frequency oscillation characteristics of the oscillator to provide the Lorentz current of the magnetometer to enhance a large dynamic range of reading, which eliminates the...

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Detalles Bibliográficos
Autores principales:	Lin, Chih-Hsuan, Song, Chao-Hung, Wen, Kuei-Ann
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8227563/ https://www.ncbi.nlm.nih.gov/pubmed/34072537 http://dx.doi.org/10.3390/mi12060635

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