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FEBID 3D-Nanoprinting at Low Substrate Temperatures: Pushing the Speed While Keeping the Quality

High-fidelity 3D printing of nanoscale objects is an increasing relevant but challenging task. Among the few fabrication techniques, focused electron beam induced deposition (FEBID) has demonstrated its high potential due to its direct-write character, nanoscale capabilities in 3D space and a very h...

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Detalles Bibliográficos
Autores principales:	Hinum-Wagner, Jakob, Kuhness, David, Kothleitner, Gerald, Winkler, Robert, Plank, Harald
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8229455/ https://www.ncbi.nlm.nih.gov/pubmed/34207654 http://dx.doi.org/10.3390/nano11061527

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