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Flexible SAW Microfluidic Devices as Wearable pH Sensors Based on ZnO Nanoparticles

In this work, a new flexible and biocompatible microfluidic pH sensor based on surface acoustic waves (SAWs) is presented. The device consists of polyethylene naphthalate (PEN) as a flexible substrate on which aluminum nitride (AlN) has been deposited as a piezoelectric material. The fabrication of...

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Autores principales: Piro, Luigi, Lamanna, Leonardo, Guido, Francesco, Balena, Antonio, Mariello, Massimo, Rizzi, Francesco, De Vittorio, Massimo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8229701/
https://www.ncbi.nlm.nih.gov/pubmed/34204874
http://dx.doi.org/10.3390/nano11061479
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author Piro, Luigi
Lamanna, Leonardo
Guido, Francesco
Balena, Antonio
Mariello, Massimo
Rizzi, Francesco
De Vittorio, Massimo
author_facet Piro, Luigi
Lamanna, Leonardo
Guido, Francesco
Balena, Antonio
Mariello, Massimo
Rizzi, Francesco
De Vittorio, Massimo
author_sort Piro, Luigi
collection PubMed
description In this work, a new flexible and biocompatible microfluidic pH sensor based on surface acoustic waves (SAWs) is presented. The device consists of polyethylene naphthalate (PEN) as a flexible substrate on which aluminum nitride (AlN) has been deposited as a piezoelectric material. The fabrication of suitable interdigitated transducers (IDTs) generates Lamb waves (L-SAW) with a center frequency ≈500 MHz traveling in the active region. A SU-8 microfluidics employing ZnO nanoparticles (NPs) functionalization as a pH-sensitive layer is fabricated between the IDTs, causing a shift in the L-SAW resonance frequency as a function of the change in pH values. The obtained sensitivity of ≈30 kHz/pH from pH 7 to pH 2 demonstrates the high potential of flexible SAW devices to be used in the measurement of pH in fluids and biosensing.
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spelling pubmed-82297012021-06-26 Flexible SAW Microfluidic Devices as Wearable pH Sensors Based on ZnO Nanoparticles Piro, Luigi Lamanna, Leonardo Guido, Francesco Balena, Antonio Mariello, Massimo Rizzi, Francesco De Vittorio, Massimo Nanomaterials (Basel) Article In this work, a new flexible and biocompatible microfluidic pH sensor based on surface acoustic waves (SAWs) is presented. The device consists of polyethylene naphthalate (PEN) as a flexible substrate on which aluminum nitride (AlN) has been deposited as a piezoelectric material. The fabrication of suitable interdigitated transducers (IDTs) generates Lamb waves (L-SAW) with a center frequency ≈500 MHz traveling in the active region. A SU-8 microfluidics employing ZnO nanoparticles (NPs) functionalization as a pH-sensitive layer is fabricated between the IDTs, causing a shift in the L-SAW resonance frequency as a function of the change in pH values. The obtained sensitivity of ≈30 kHz/pH from pH 7 to pH 2 demonstrates the high potential of flexible SAW devices to be used in the measurement of pH in fluids and biosensing. MDPI 2021-06-03 /pmc/articles/PMC8229701/ /pubmed/34204874 http://dx.doi.org/10.3390/nano11061479 Text en © 2021 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Piro, Luigi
Lamanna, Leonardo
Guido, Francesco
Balena, Antonio
Mariello, Massimo
Rizzi, Francesco
De Vittorio, Massimo
Flexible SAW Microfluidic Devices as Wearable pH Sensors Based on ZnO Nanoparticles
title Flexible SAW Microfluidic Devices as Wearable pH Sensors Based on ZnO Nanoparticles
title_full Flexible SAW Microfluidic Devices as Wearable pH Sensors Based on ZnO Nanoparticles
title_fullStr Flexible SAW Microfluidic Devices as Wearable pH Sensors Based on ZnO Nanoparticles
title_full_unstemmed Flexible SAW Microfluidic Devices as Wearable pH Sensors Based on ZnO Nanoparticles
title_short Flexible SAW Microfluidic Devices as Wearable pH Sensors Based on ZnO Nanoparticles
title_sort flexible saw microfluidic devices as wearable ph sensors based on zno nanoparticles
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8229701/
https://www.ncbi.nlm.nih.gov/pubmed/34204874
http://dx.doi.org/10.3390/nano11061479
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