Micro-Raman Characterization of Structural Features of High-k Stack Layer of SOI Nanowire Chip, Designed to Detect Circular RNA Associated with the Development of Glioma

The application of micro-Raman spectroscopy was used for characterization of structural features of the high-k stack (h-k) layer of “silicon-on-insulator” (SOI) nanowire (NW) chip (h-k-SOI-NW chip), including Al(2)O(3) and HfO(2) in various combinations after heat treatment from 425 to 1000 °C. Afte...

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Detalles Bibliográficos
Autores principales: Ivanov, Yuri D., Malsagova, Kristina A., Popov, Vladimir P., Kupriyanov, Igor N., Pleshakova, Tatyana O., Galiullin, Rafael A., Ziborov, Vadim S., Dolgoborodov, Alexander Yu., Petrov, Oleg F., Miakonkikh, Andrey V., Rudenko, Konstantin V., Glukhov, Alexander V., Smirnov, Alexander Yu., Usachev, Dmitry Yu., Gadzhieva, Olga A., Bashiryan, Boris A., Shimansky, Vadim N., Enikeev, Dmitry V., Potoldykova, Natalia V., Archakov, Alexander I.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8234461/
https://www.ncbi.nlm.nih.gov/pubmed/34207029
http://dx.doi.org/10.3390/molecules26123715

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