Cargando…

The Recent Progress of MEMS/NEMS Resonators

MEMS/NEMS resonators are widely studied in biological detection, physical sensing, and quantum coupling. This paper reviews the latest research progress of MEMS/NEMS resonators with different structures. The resonance performance, new test method, and manufacturing process of single or double-clampe...

Descripción completa

Detalles Bibliográficos
Autores principales:	Wei, Lei, Kuai, Xuebao, Bao, Yidi, Wei, Jiangtao, Yang, Liangliang, Song, Peishuai, Zhang, Mingliang, Yang, Fuhua, Wang, Xiaodong
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Review
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8235191/ https://www.ncbi.nlm.nih.gov/pubmed/34205469 http://dx.doi.org/10.3390/mi12060724

Ejemplares similares

Recent Progress of Miniature MEMS Pressure Sensors
por: Song, Peishuai, et al.
Publicado: (2020)

Suppression Method of Optical Noises in Resonator-Integrated Optic Gyroscopes
por: Kuai, Xuebao, et al.
Publicado: (2022)

Thermoelectric Properties of Cu(2)Se Nano-Thin Film by Magnetron Sputtering
por: Yang, Liangliang, et al.
Publicado: (2021)

Materials and failures in MEMS and NEMS
por: Tiwari, Atul, et al.
Publicado: (2015)

The Fabrication of Micro/Nano Structures by Laser Machining
por: Yang, Liangliang, et al.
Publicado: (2019)

MEMS and NEMS: Systems, Devices, and Structures
por: Lyshevski, Sergey E
Publicado: (2002)

Selective Carbon Material Engineering for Improved MEMS and NEMS
por: Neuville, Stephane
Publicado: (2019)

Development Trends and Perspectives of Future Sensors and MEMS/NEMS
por: Zhu, Jianxiong, et al.
Publicado: (2019)

Vibrations of Elastic Systems: With Applications to MEMS and NEMS
por: Magrab, Edward B
Publicado: (2012)

Molecular Momentum Transport at Fluid-Solid Interfaces in MEMS/NEMS: A Review
por: Cao, Bing-Yang, et al.
Publicado: (2009)

Progresses in Synthesis and Application of SiC Films: From CVD to ALD and from MEMS to NEMS
por: Fraga, Mariana, et al.
Publicado: (2020)

Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuators
por: Du, Han, et al.
Publicado: (2016)

Self-powered and soft polymer MEMS/NEMS devices
por: Kottapalli, Ajay Giri Prakash, et al.
Publicado: (2019)

Fabrication and Characterization of Black GaAs Nanoarrays via ICP Etching
por: Ma, Jing, et al.
Publicado: (2021)

Editorial for the Special Issue on Development of CMOS-MEMS/NEMS Devices
por: Verd, Jaume, et al.
Publicado: (2019)

Editorial for the Special Issue on MEMS/NEMS Sensors: Fabrication and Application
por: Koley, Goutam
Publicado: (2019)

Towards Repeatable, Scalable Graphene Integrated Micro-Nano Electromechanical Systems (MEMS/NEMS)
por: Cho, Joon Hyong, et al.
Publicado: (2021)

Doping Effect on Cu(2)Se Thermoelectric Performance: A Review
por: Qin, Yuanhao, et al.
Publicado: (2020)

A Novel Piezoresistive MEMS Pressure Sensors Based on Temporary Bonding Technology
por: Song, Peishuai, et al.
Publicado: (2020)

Role of Nanomaterials in the Fabrication of bioNEMS/MEMS for Biomedical Applications and towards Pioneering Food Waste Utilisation
por: Dahlan, Nuraina Anisa, et al.
Publicado: (2022)

Micro and Nano Interdigitated Electrode Array (IDEA)-Based MEMS/NEMS as Electrochemical Transducers: A Review
por: Kosri, Elyana, et al.
Publicado: (2022)

Manufacture and characterization of graphene membranes with suspended silicon proof masses for MEMS and NEMS applications
por: Fan, Xuge, et al.
Publicado: (2020)

New Protic Ionic Liquids as Potential Additives to Lubricate Si-Based MEMS/NEMS
por: Donato, Mariana T., et al.
Publicado: (2023)

Graphene–aluminum nitride NEMS resonant infrared detector
por: Qian, Zhenyun, et al.
Publicado: (2016)

A Universal Biomolecular Concentrator To Enhance Biomolecular Surface Binding Based on Acoustic NEMS Resonator
por: Liu, Wenpeng, et al.
Publicado: (2018)

Multi-Frequency Resonance Behaviour of a Si Fractal NEMS Resonator
por: Tzanov, Vassil, et al.
Publicado: (2020)

A Resonant Z-Axis Aluminum Nitride Thin-Film Piezoelectric MEMS Accelerometer
por: Yang, Jian, et al.
Publicado: (2019)

Instability of Contact Resistance in MEMS and NEMS DC Switches under Low Force: the Role of Alien Films on the Contact Surface
por: Qiu, Haodong, et al.
Publicado: (2013)

Optical and surface energy probe of Hamaker constant in copper oxide thin films for NEMS and MEMS stiction control applications
por: Ogwu, Abraham, et al.
Publicado: (2021)

Recent Advances in MEMS-Based Microthrusters
por: Liu, Bendong, et al.
Publicado: (2019)

A Switchable High-Performance RF-MEMS Resonator with Flexible Frequency Generations
por: Chen, Zeji, et al.
Publicado: (2020)

Performance optimization of In(Ga)As quantum dot intermediate band solar cells
por: Yang, Guiqiang, et al.
Publicado: (2023)

Reaching silicon-based NEMS performances with 3D printed nanomechanical resonators
por: Stassi, Stefano, et al.
Publicado: (2021)

Coupled Nanomechanical Graphene Resonators: A Promising Platform for Scalable NEMS Networks
por: Carter, Brittany, et al.
Publicado: (2023)

Recent Progress on Photoacoustic Imaging Enhanced with Microelectromechanical Systems (MEMS) Technologies
por: Lee, Changho, et al.
Publicado: (2018)

Heavily Boron-Doped Silicon Layer for the Fabrication of Nanoscale Thermoelectric Devices
por: Ma, Zhe, et al.
Publicado: (2018)

Idén már nem várható részecskeütköztetés
Publicado: (2008)

Quantum-squeezing effects of strained multilayer graphene NEMS
por: Xu, Yang, et al.
Publicado: (2011)

Encapsulation of NEM Memory Switches for Monolithic-Three-Dimensional (M3D) CMOS–NEM Hybrid Circuits
por: Jo, Hyun Chan, et al.
Publicado: (2018)

Research Progress of MEMS Inertial Switches
por: Liu, Min, et al.
Publicado: (2022)

Cannot write session to /tmp/vufind_sessions/sess_4u4mjqffrr9j5111mvcpt294gu