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Fabrication of Nanoscale Oxide Textured Surfaces on Polymers
Nanoscale textured surfaces play an important role in creating antibacterial surfaces, broadband anti-reflective properties, and super-hydrophobicity in many technological systems. Creating nanoscale oxide textures on polymer substrates for applications such as ophthalmic lenses and flexible electro...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8271387/ https://www.ncbi.nlm.nih.gov/pubmed/34279353 http://dx.doi.org/10.3390/polym13132209 |
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author | Barick, Barun K. Shomrat, Neta Green, Uri Katzman, Zohar Segal-Peretz, Tamar |
author_facet | Barick, Barun K. Shomrat, Neta Green, Uri Katzman, Zohar Segal-Peretz, Tamar |
author_sort | Barick, Barun K. |
collection | PubMed |
description | Nanoscale textured surfaces play an important role in creating antibacterial surfaces, broadband anti-reflective properties, and super-hydrophobicity in many technological systems. Creating nanoscale oxide textures on polymer substrates for applications such as ophthalmic lenses and flexible electronics imposes additional challenges over conventional nanofabrication processes since polymer substrates are typically temperature-sensitive and chemically reactive. In this study, we investigated and developed nanofabrication methodologies to create highly ordered oxide nanostructures on top of polymer substrates without any lithography process. We developed suitable block copolymer self-assembly, sequential infiltration synthesis (SIS), and reactive ion etching (RIE) for processes on polymer substrates. Importantly, to prevent damage to the temperature-sensitive polymer and polymer/oxide interface, we developed the process to be entirely performed at low temperatures, that is, below 80 °C, using a combination of UV crosslinking, solvent annealing, and modified SIS and RIE processes. In addition, we developed a substrate passivation process to overcome reactivity between the polymer substrate and the SIS precursors as well as a high precision RIE process to enable deep etching into the thermally insulated substrate. These methodologies widen the possibilities of nanofabrication on polymers. |
format | Online Article Text |
id | pubmed-8271387 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2021 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-82713872021-07-11 Fabrication of Nanoscale Oxide Textured Surfaces on Polymers Barick, Barun K. Shomrat, Neta Green, Uri Katzman, Zohar Segal-Peretz, Tamar Polymers (Basel) Article Nanoscale textured surfaces play an important role in creating antibacterial surfaces, broadband anti-reflective properties, and super-hydrophobicity in many technological systems. Creating nanoscale oxide textures on polymer substrates for applications such as ophthalmic lenses and flexible electronics imposes additional challenges over conventional nanofabrication processes since polymer substrates are typically temperature-sensitive and chemically reactive. In this study, we investigated and developed nanofabrication methodologies to create highly ordered oxide nanostructures on top of polymer substrates without any lithography process. We developed suitable block copolymer self-assembly, sequential infiltration synthesis (SIS), and reactive ion etching (RIE) for processes on polymer substrates. Importantly, to prevent damage to the temperature-sensitive polymer and polymer/oxide interface, we developed the process to be entirely performed at low temperatures, that is, below 80 °C, using a combination of UV crosslinking, solvent annealing, and modified SIS and RIE processes. In addition, we developed a substrate passivation process to overcome reactivity between the polymer substrate and the SIS precursors as well as a high precision RIE process to enable deep etching into the thermally insulated substrate. These methodologies widen the possibilities of nanofabrication on polymers. MDPI 2021-07-03 /pmc/articles/PMC8271387/ /pubmed/34279353 http://dx.doi.org/10.3390/polym13132209 Text en © 2021 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Barick, Barun K. Shomrat, Neta Green, Uri Katzman, Zohar Segal-Peretz, Tamar Fabrication of Nanoscale Oxide Textured Surfaces on Polymers |
title | Fabrication of Nanoscale Oxide Textured Surfaces on Polymers |
title_full | Fabrication of Nanoscale Oxide Textured Surfaces on Polymers |
title_fullStr | Fabrication of Nanoscale Oxide Textured Surfaces on Polymers |
title_full_unstemmed | Fabrication of Nanoscale Oxide Textured Surfaces on Polymers |
title_short | Fabrication of Nanoscale Oxide Textured Surfaces on Polymers |
title_sort | fabrication of nanoscale oxide textured surfaces on polymers |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8271387/ https://www.ncbi.nlm.nih.gov/pubmed/34279353 http://dx.doi.org/10.3390/polym13132209 |
work_keys_str_mv | AT barickbarunk fabricationofnanoscaleoxidetexturedsurfacesonpolymers AT shomratneta fabricationofnanoscaleoxidetexturedsurfacesonpolymers AT greenuri fabricationofnanoscaleoxidetexturedsurfacesonpolymers AT katzmanzohar fabricationofnanoscaleoxidetexturedsurfacesonpolymers AT segalperetztamar fabricationofnanoscaleoxidetexturedsurfacesonpolymers |