Cargando…
Selective Vacuum Evaporation by the Control of the Chemistry of Gas Phase in Vacuum Refining of Si
[Image: see text] The evaporation of P from liquid Si under vacuum and reduced pressures of H(2), He, and Ar was studied to evaluate the feasibility of effective P removal with insignificant Si loss. It was found that the introduction of Ar and He inert gases at low pressures reduces the rate of P r...
| Autores principales: | , , , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
American
Chemical Society
2021
|
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8280733/ https://www.ncbi.nlm.nih.gov/pubmed/34098717 http://dx.doi.org/10.1021/acs.langmuir.1c00876 |