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Nb Texture Evolution and Interdiffusion in Nb/Si-Layered Systems

[Image: see text] In this paper, we present a detailed study on the microstructure evolution and interdiffusion in Nb/Si-layered systems. Interlayer formation during the early stages of growth in sputter-deposited Nb-on-Si and Si-on-Nb bilayer systems is studied in vacuo using a high-sensitivity low...

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Detalles Bibliográficos
Autores principales:	Chandrasekaran, Anirudhan, van de Kruijs, Robbert W.E., Sturm, Jacobus M., Bijkerk, Fred
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	American Chemical Society 2021
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8289241/ https://www.ncbi.nlm.nih.gov/pubmed/34165281 http://dx.doi.org/10.1021/acsami.1c06210

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