Cargando…

Fabrication of Graphoepitaxial Gate-All-Around Si Circuitry Patterned Nanowire Arrays Using Block Copolymer Assisted Hard Mask Approach

[Image: see text] We demonstrate the fabrication of sub-20 nm gate-all-around silicon (Si) nanowire field effect transistor structures using self-assembly. To create nanopatterned Si feature arrays, a block-copolymer-assisted hard mask approach was utilized using a topographically patterned substrat...

Descripción completa

Detalles Bibliográficos
Autores principales:	Ghoshal, Tandra, Senthamaraikannan, Ramsankar, Shaw, Matthew T., Lundy, Ross, Selkirk, Andrew, Morris, Michael A.
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	American Chemical Society 2021
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8291765/ https://www.ncbi.nlm.nih.gov/pubmed/34042425 http://dx.doi.org/10.1021/acsnano.0c09232

Ejemplares similares

Size and space controlled hexagonal arrays of superparamagnetic iron oxide nanodots: magnetic studies and application
por: Ghoshal, Tandra, et al.
Publicado: (2013)

A Highly Efficient Sensor Platform Using Simply Manufactured Nanodot Patterned Substrates
por: Rasappa, Sozaraj, et al.
Publicado: (2015)

Large-Area Fabrication of Vertical Silicon Nanotube Arrays via Toroidal Micelle Self-Assembly
por: Prochukhan, Nadezda, et al.
Publicado: (2021)

Sub-25 nm Inorganic and Dielectric Nanopattern Arrays on Substrates: A Block Copolymer-Assisted Lithography
por: Ghoshal, Tandra, et al.
Publicado: (2021)

Drawing Circuits with Carbon Nanotubes: Scratch-Induced Graphoepitaxial Growth of Carbon Nanotubes on Amorphous Silicon Oxide Substrates
por: Choi, Won Jin, et al.
Publicado: (2014)

Self-Assembled Nanofeatures in Complex Three-Dimensional Topographies via Nanoimprint and Block Copolymer Lithography Methods
por: Cummins, Cian, et al.
Publicado: (2017)

Nanopatterning via Self-Assembly of a Lamellar-Forming Polystyrene-block-Poly(dimethylsiloxane) Diblock Copolymer on Topographical Substrates Fabricated by Nanoimprint Lithography
por: Borah, Dipu, et al.
Publicado: (2018)

Development of Ordered, Porous (Sub-25 nm Dimensions) Surface Membrane Structures Using a Block Copolymer Approach
por: Ghoshal, Tandra, et al.
Publicado: (2018)

Vertical Silicon Nanowire Field Effect Transistors with Nanoscale Gate-All-Around
por: Guerfi, Youssouf, et al.
Publicado: (2016)

Nanowire gate all around-TFET-based biosensor by considering ambipolar transport
por: Reddy, N. Nagendra, et al.
Publicado: (2021)

Implementation of Gate-All-Around Gate-Engineered Charge Plasma Nanowire FET-Based Common Source Amplifier
por: Singh, Sarabdeep, et al.
Publicado: (2023)

Structural Evolution of Nanophase Separated Block Copolymer Patterns in Supercritical CO(2)
por: Ghoshal, Tandra, et al.
Publicado: (2021)

Cryogenic Transport Characteristics of P-Type Gate-All-Around Silicon Nanowire MOSFETs
por: Gu, Jie, et al.
Publicado: (2021)

Biodegradation of Poly (Butylene Succinate) (PBS)/Stearate Modified Magnesium-Aluminium Layered Double Hydroxide Composites under Marine Conditions Prepared via Melt Compounding
por: Shaiju, Parameswaran, et al.
Publicado: (2020)

Room Temperature Fabrication of Macroporous Lignin Membranes for the Scalable Production of Black Silicon
por: Prochukhan, Nadezda, et al.
Publicado: (2022)

A Simulation Study of a Gate-All-Around Nanowire Transistor with a Core–Insulator
por: Zhang, Yannan, et al.
Publicado: (2020)

Low-Consumption Synaptic Devices Based on Gate-All-Around InAs Nanowire Field-Effect Transistors
por: Zha, Chaofei, et al.
Publicado: (2022)

Optimization and Control of Large Block Copolymer Self-Assembly via Precision Solvent Vapor Annealing
por: Selkirk, Andrew, et al.
Publicado: (2021)

Active‐ion‐gated room temperature acetone gas sensing of ZnO nanowires array
por: Guo, Junmeng, et al.
Publicado: (2022)

Vertical Gate-All-Around Nanowire GaSb-InAs Core-Shell n-Type Tunnel FETs
por: Vasen, T., et al.
Publicado: (2019)

On the Vertically Stacked Gate-All-Around Nanosheet and Nanowire Transistor Scaling beyond the 5 nm Technology Node
por: Wong, Hei, et al.
Publicado: (2022)

Hard template synthesis of metal nanowires
por: Kawamura, Go, et al.
Publicado: (2014)

Coplanar-gate ZnO nanowire field emitter arrays with enhanced gate-control performance using a ring-shaped cathode
por: Zhao, Long, et al.
Publicado: (2018)

Highly gate-tuneable Rashba spin-orbit interaction in a gate-all-around InAs nanowire metal-oxide-semiconductor field-effect transistor
por: Takase, K., et al.
Publicado: (2017)

Fabrication of Highly Ordered Polymeric Nanodot and Nanowire Arrays Templated by Supramolecular Assembly Block Copolymer Nanoporous Thin Films
por: Liu, Xikui, et al.
Publicado: (2009)

Evolution of type-II hetero-strain cylindrical-gate-all-around nanowire FET for exploration and analysis of enriched performances
por: Barik, Rasmita, et al.
Publicado: (2023)

Optical properties of Ni and Cu nanowire arrays and Ni/Cu superlattice nanowire arrays
por: Zhang, Yaya, et al.
Publicado: (2012)

Fabrication of gold nanowires in micropatterns using block copolymers
por: Kim, Ye Chan, et al.
Publicado: (2018)

An intelligent face mask integrated with high density conductive nanowire array for directly exhaled coronavirus aerosols screening
por: Xue, Qiannan, et al.
Publicado: (2021)

Hard Superconducting Gap in InSb Nanowires
por: Gül, Önder, et al.
Publicado: (2017)

Improved sensing characteristics of dual-gate transistor sensor using silicon nanowire arrays defined by nanoimprint lithography
por: Lim, Cheol-Min, et al.
Publicado: (2017)

Optimizing Performance of Coaxis Planar-Gated ZnO Nanowire Field-Emitter Arrays by Tuning Pixel Density
por: Zhang, Songyou, et al.
Publicado: (2022)

Morphology Engineering of the Asymmetric PS-b-P4VP Block Copolymer: From Porous to Nanodot Oxide Structures
por: Singh, Sajan, et al.
Publicado: (2023)

All-2D ReS(2) transistors with split gates for logic circuitry
por: Kwon, Junyoung, et al.
Publicado: (2019)

Nanowire mask offers big advantages for PPE
por: Donaldson, Laurie
Publicado: (2020)

Degradation mechanisms in gate-all-around silicon Nanowire field effect transistor under electrostatic discharge stress – a modeling approach
por: Tan, Cher Ming, et al.
Publicado: (2014)

Fabrication of Polypyrrole Nanowire and Nanotube Arrays
por: Cheng, Fa-Liang, et al.
Publicado: (2005)

Tensile properties of segmented block copolymers with monodisperse hard segments
por: Biemond, G. J. E., et al.
Publicado: (2008)

Perovskite nanowire–block copolymer composites with digitally programmable polarization anisotropy
por: Zhou, Nanjia, et al.
Publicado: (2019)

Single-Grain Gate-All-Around Si Nanowire FET Using Low-Thermal-Budget Processes for Monolithic Three-Dimensional Integrated Circuits
por: Hsieh, Tung-Ying, et al.
Publicado: (2020)

Cannot write session to /tmp/vufind_sessions/sess_schfkqrgcdusb2vl2laajl0nmt