Development of a Rotary Ultrasonic Motor with Double-Sided Staggered Teeth

Based on the conventional structure of traveling wave ultrasonic motor, a rotary ultrasonic motor with double-sided staggered teeth was proposed. Both sides of the stator could be used to actuate the rotors to rotate and output torque. Moreover, the staggered teeth in the stator could be dedicated to accommodating the piezoelectric ceramic chips. Under the excitation of two alternating voltages with a 90° phase difference, a traveling wave could be generated in the ring-like stator. Then, a rotary motion could be realized by means of the friction between the rotors and the driving teeth of the stator. The finite element method was adopted to analyze the motion trajectories of the driving tips. Moreover, the experimental results showed that the load-free maximum speed and maximum output torque of the prototype were 99 rpm and 0.19 N·m at a voltage of 150 V(p) with a frequency of 28.25 kHz.