Shape- and Element-Sensitive Reconstruction of Periodic Nanostructures with Grazing Incidence X-ray Fluorescence Analysis and Machine Learning

The characterization of nanostructured surfaces with sensitivity in the sub-nm range is of high importance for the development of current and next-generation integrated electronic circuits. Modern transistor architectures for, e.g., FinFETs are realized by lithographic fabrication of complex, well-o...

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Detalles Bibliográficos
Autores principales: Andrle, Anna, Hönicke, Philipp, Gwalt, Grzegorz, Schneider, Philipp-Immanuel, Kayser, Yves, Siewert, Frank, Soltwisch, Victor
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8306736/
https://www.ncbi.nlm.nih.gov/pubmed/34201579
http://dx.doi.org/10.3390/nano11071647

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