Mechanical and Magnetic Properties of Double Layered Nanostructures of Tin and Zirconium Oxides Grown by Atomic Layer Deposition

Double layered stacks of ZrO(2) and SnO(2) films, aiming at the synthesis of thin magnetic and elastic material layers, were grown by atomic layer deposition to thicknesses in the range of 20–25 nm at 300 °C from ZrCl(4), SnI(4), H(2)O, and O(3) as precursors. The as-deposited nanostructures consist...

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Detalles Bibliográficos
Autores principales: Tamm, Aile, Piirsoo, Helle-Mai, Jõgiaas, Taivo, Tarre, Aivar, Link, Joosep, Stern, Raivo, Kukli, Kaupo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8307560/
https://www.ncbi.nlm.nih.gov/pubmed/34206394
http://dx.doi.org/10.3390/nano11071633

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8307560/
https://www.ncbi.nlm.nih.gov/pubmed/34206394
http://dx.doi.org/10.3390/nano11071633

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