Carbon/Silicone Nanocomposite-Enabled Soft Pressure Sensors with a Liquid-Filled Cell Structure Design for Low Pressure Measurement

In the fields of humanoid robots, soft robotics, and wearable electronics, the development of artificial skins entails pressure sensors that are low in modulus, high in sensitivity, and minimal in hysteresis. However, few sensors in the literature can meet all the three requirements, especially in the low pressure range (<10 kPa). This article presents a design for such pressure sensors. The bioinspired liquid-filled cell-type structural design endows the sensor with appropriate softness (Young’s modulus < 230 kPa) and high sensitivity (highest at 0.7 kPa(−1)) to compression forces below 0.65 N (6.8 kPa). The low-end detection limit is ~0.0012 N (13 Pa), only triple the mass of a bee. Minimal resistance hysteresis of the pressure sensor is 7.7%. The low hysteresis is attributed to the study on the carbon/silicone nanocomposite, which reveals the effect of heat treatment on its mechanical and electromechanical hysteresis. Pressure measurement range and sensitivity of the sensor can be tuned by changing the structure and strain gauge parameters. This concept of sensor design, when combined with microfluidics technology, is expected to enable soft, stretchable, and highly precise touch-sensitive artificial skins.