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A Proposal for a Novel Surface-Stress Based BioMEMS Sensor Using an Optical Sensing System for Highly Sensitive Diagnoses of Bio-particles
In this paper, a BioMEMS sensor by using a surface-stress sensing approach, connected to a highly sensitive optical sensing system, is proposed to diagnose various types of biomolecules. The MEMS transducer is composed of a fixed–fixed beam with immobilized receptors on the surface which is connecte...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Springer US
2021
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8313884/ https://www.ncbi.nlm.nih.gov/pubmed/34335120 http://dx.doi.org/10.1007/s11220-021-00355-1 |