The Measurement and Uncertainty of a Calibration Standard for the Scanning Electron Microscope

Standard Reference Material 484 is an artifact for calibrating the magnification scale of a Scanning Electron Microscope (SEM) within the range of 1000 × to 20000 ×. Seven issues, SRM-484, and SRM-484a to SRM-484f, have been certified between 1977 and 1992. This publication documents the instrumenta...

Descripción completa

Detalles Bibliográficos
Autores principales: Fu, J., Croarkin, M. C., Vorburger, T. V.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology 1994
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8345241/
https://www.ncbi.nlm.nih.gov/pubmed/37404711
http://dx.doi.org/10.6028/jres.099.015
_version_ 1783734581934948352
author Fu, J.
Croarkin, M. C.
Vorburger, T. V.
author_facet Fu, J.
Croarkin, M. C.
Vorburger, T. V.
author_sort Fu, J.
collection PubMed
description Standard Reference Material 484 is an artifact for calibrating the magnification scale of a Scanning Electron Microscope (SEM) within the range of 1000 × to 20000 ×. Seven issues, SRM-484, and SRM-484a to SRM-484f, have been certified between 1977 and 1992. This publication documents the instrumentation, measurement procedures and determination of uncertainty for SRM-484 and illustrates with data from issues 484e and 484f.
format Online
Article
Text
id pubmed-8345241
institution National Center for Biotechnology Information
language English
publishDate 1994
publisher [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology
record_format MEDLINE/PubMed
spelling pubmed-83452412023-07-03 The Measurement and Uncertainty of a Calibration Standard for the Scanning Electron Microscope Fu, J. Croarkin, M. C. Vorburger, T. V. J Res Natl Inst Stand Technol Article Standard Reference Material 484 is an artifact for calibrating the magnification scale of a Scanning Electron Microscope (SEM) within the range of 1000 × to 20000 ×. Seven issues, SRM-484, and SRM-484a to SRM-484f, have been certified between 1977 and 1992. This publication documents the instrumentation, measurement procedures and determination of uncertainty for SRM-484 and illustrates with data from issues 484e and 484f. [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology 1994 /pmc/articles/PMC8345241/ /pubmed/37404711 http://dx.doi.org/10.6028/jres.099.015 Text en https://creativecommons.org/publicdomain/zero/1.0/The Journal of Research of the National Institute of Standards and Technology is a publication of the U.S. Government. The papers are in the public domain and are not subject to copyright in the United States. Articles from J Res may contain photographs or illustrations copyrighted by other commercial organizations or individuals that may not be used without obtaining prior approval from the holder of the copyright.
spellingShingle Article
Fu, J.
Croarkin, M. C.
Vorburger, T. V.
The Measurement and Uncertainty of a Calibration Standard for the Scanning Electron Microscope
title The Measurement and Uncertainty of a Calibration Standard for the Scanning Electron Microscope
title_full The Measurement and Uncertainty of a Calibration Standard for the Scanning Electron Microscope
title_fullStr The Measurement and Uncertainty of a Calibration Standard for the Scanning Electron Microscope
title_full_unstemmed The Measurement and Uncertainty of a Calibration Standard for the Scanning Electron Microscope
title_short The Measurement and Uncertainty of a Calibration Standard for the Scanning Electron Microscope
title_sort measurement and uncertainty of a calibration standard for the scanning electron microscope
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8345241/
https://www.ncbi.nlm.nih.gov/pubmed/37404711
http://dx.doi.org/10.6028/jres.099.015
work_keys_str_mv AT fuj themeasurementanduncertaintyofacalibrationstandardforthescanningelectronmicroscope
AT croarkinmc themeasurementanduncertaintyofacalibrationstandardforthescanningelectronmicroscope
AT vorburgertv themeasurementanduncertaintyofacalibrationstandardforthescanningelectronmicroscope
AT fuj measurementanduncertaintyofacalibrationstandardforthescanningelectronmicroscope
AT croarkinmc measurementanduncertaintyofacalibrationstandardforthescanningelectronmicroscope
AT vorburgertv measurementanduncertaintyofacalibrationstandardforthescanningelectronmicroscope

Ejemplares similares