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Influence of Graphite Layer on Electronic Properties of MgO/6H-SiC(0001) Interface
This paper concerns research on magnesium oxide layers in terms of their potential use as a gate material for SiC MOSFET structures. The two basic systems of MgO/SiC(0001) and MgO/graphite/SiC(0001) were deeply investigated in situ under ultrahigh vacuum (UHV). In both cases, the MgO layers were obt...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8347823/ https://www.ncbi.nlm.nih.gov/pubmed/34361382 http://dx.doi.org/10.3390/ma14154189 |
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author | Lewandków, Rafał Mazur, Piotr Trembułowicz, Artur Sabik, Agata Wasielewski, Radosław Grodzicki, Miłosz |
author_facet | Lewandków, Rafał Mazur, Piotr Trembułowicz, Artur Sabik, Agata Wasielewski, Radosław Grodzicki, Miłosz |
author_sort | Lewandków, Rafał |
collection | PubMed |
description | This paper concerns research on magnesium oxide layers in terms of their potential use as a gate material for SiC MOSFET structures. The two basic systems of MgO/SiC(0001) and MgO/graphite/SiC(0001) were deeply investigated in situ under ultrahigh vacuum (UHV). In both cases, the MgO layers were obtained by a reactive evaporation method. Graphite layers terminating the SiC(0001) surface were formed by thermal annealing in UHV. The physicochemical properties of the deposited MgO layers and the systems formed with their participation were determined using X-ray and UV photoelectron spectroscopy (XPS, UPS). The results confirmed the formation of MgO compounds. Energy level diagrams were constructed for both systems. The valence band maximum of MgO layers was embedded deeper on the graphitized surface than on the SiC(0001). |
format | Online Article Text |
id | pubmed-8347823 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2021 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-83478232021-08-08 Influence of Graphite Layer on Electronic Properties of MgO/6H-SiC(0001) Interface Lewandków, Rafał Mazur, Piotr Trembułowicz, Artur Sabik, Agata Wasielewski, Radosław Grodzicki, Miłosz Materials (Basel) Article This paper concerns research on magnesium oxide layers in terms of their potential use as a gate material for SiC MOSFET structures. The two basic systems of MgO/SiC(0001) and MgO/graphite/SiC(0001) were deeply investigated in situ under ultrahigh vacuum (UHV). In both cases, the MgO layers were obtained by a reactive evaporation method. Graphite layers terminating the SiC(0001) surface were formed by thermal annealing in UHV. The physicochemical properties of the deposited MgO layers and the systems formed with their participation were determined using X-ray and UV photoelectron spectroscopy (XPS, UPS). The results confirmed the formation of MgO compounds. Energy level diagrams were constructed for both systems. The valence band maximum of MgO layers was embedded deeper on the graphitized surface than on the SiC(0001). MDPI 2021-07-27 /pmc/articles/PMC8347823/ /pubmed/34361382 http://dx.doi.org/10.3390/ma14154189 Text en © 2021 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Lewandków, Rafał Mazur, Piotr Trembułowicz, Artur Sabik, Agata Wasielewski, Radosław Grodzicki, Miłosz Influence of Graphite Layer on Electronic Properties of MgO/6H-SiC(0001) Interface |
title | Influence of Graphite Layer on Electronic Properties of MgO/6H-SiC(0001) Interface |
title_full | Influence of Graphite Layer on Electronic Properties of MgO/6H-SiC(0001) Interface |
title_fullStr | Influence of Graphite Layer on Electronic Properties of MgO/6H-SiC(0001) Interface |
title_full_unstemmed | Influence of Graphite Layer on Electronic Properties of MgO/6H-SiC(0001) Interface |
title_short | Influence of Graphite Layer on Electronic Properties of MgO/6H-SiC(0001) Interface |
title_sort | influence of graphite layer on electronic properties of mgo/6h-sic(0001) interface |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8347823/ https://www.ncbi.nlm.nih.gov/pubmed/34361382 http://dx.doi.org/10.3390/ma14154189 |
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