Pragmatic Micrometre to Millimetre Calibration Using Multiple Methods for Low-Coherence Interferometer in Embedded Metrology Applications

In-situ metrology utilised for surface topography, texture and form analysis along with quality control processes requires a high-level of reliability. Hence, a traceable method for calibrating the measurement system’s transfer function is required at regular intervals. This paper compares three met...

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Detalles Bibliográficos
Autores principales: Hovell, Tom, Petzing, Jon, Justham, Laura, Kinnell, Peter
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8347976/
https://www.ncbi.nlm.nih.gov/pubmed/34372336
http://dx.doi.org/10.3390/s21155101

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8347976/
https://www.ncbi.nlm.nih.gov/pubmed/34372336
http://dx.doi.org/10.3390/s21155101

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