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Pragmatic Micrometre to Millimetre Calibration Using Multiple Methods for Low-Coherence Interferometer in Embedded Metrology Applications
In-situ metrology utilised for surface topography, texture and form analysis along with quality control processes requires a high-level of reliability. Hence, a traceable method for calibrating the measurement system’s transfer function is required at regular intervals. This paper compares three met...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2021
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8347976/ https://www.ncbi.nlm.nih.gov/pubmed/34372336 http://dx.doi.org/10.3390/s21155101 |