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Optical-Fiber Microsphere-Based Temperature Sensors with ZnO ALD Coating—Comparative Study
This study presents the microsphere-based fiber-optic sensor with the ZnO Atomic Layer Deposition coating thickness of 100 nm and 200 nm for temperature measurements. Metrological properties of the sensor were investigated over the temperature range from 100 °C to 300 °C, with a 10 °C step. The inte...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2021
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8348085/ https://www.ncbi.nlm.nih.gov/pubmed/34372220 http://dx.doi.org/10.3390/s21154982 |