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A wafer-scale fabrication method for three-dimensional plasmonic hollow nanopillars

Access to nanofabrication strategies for crafting three-dimensional plasmonic structures is limited. In this work, a fabrication strategy to produce 3D plasmonic hollow nanopillars (HNPs) using Talbot lithography and I-line photolithography is introduced. This method is named subtractive hybrid lith...

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Detalles Bibliográficos
Autores principales:	Jonker, D., Jafari, Z., Winczewski, J. P., Eyovge, C., Berenschot, J. W., Tas, N. R., Gardeniers, J. G. E., De Leon, I., Susarrey-Arce, A.
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	RSC 2021
Materias:	Chemistry
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8386417/ https://www.ncbi.nlm.nih.gov/pubmed/34485816 http://dx.doi.org/10.1039/d1na00316j

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