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Measurement of Nanometre-Scale Gate Oxide Thicknesses by Energy-Dispersive X-ray Spectroscopy in a Scanning Electron Microscope Combined with Monte Carlo Simulations

A procedure based on energy-dispersive X-ray spectroscopy in a scanning electron microscope (SEM-EDXS) is proposed to measure ultra-thin oxide layer thicknesses to atomic scale precision in top-down instead of cross-sectional geometry. The approach is based on modelling the variation of the electron...

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Detalles Bibliográficos
Autor principal:	Walther, Thomas
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8399566/ https://www.ncbi.nlm.nih.gov/pubmed/34443947 http://dx.doi.org/10.3390/nano11082117

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